Timed Petri Net Models of Cluster Tools

Abstract

Hierarchical analysis of manufacturing systems is performed in a top-down manner in which a general, approximate model is used to capture the main effects of component interconnections, while more detailed models of components provide the detailed information needed for the derivation of performance characteristics of the entire system. For Petri net models, this approach corresponds to stepwise refinements of models. Structural analysis, based on place invariants combined with simple net transformations, is used to obtain performance characteristics of the modeled systems.